Metal Sputtering Machine

Description

The Sputter Coater 108 auto offers the choice of manual or automated operation. The specifications also include automatic vent (with a choice of vent gas) and argon purge control.

In automatic mode, the coater can be controlled in two ways. First, the digital timer can be used to give repeatable coatings or the Film Thickness Controller MTM-20 (optional) can be used to terminate the sputtering process at the desired thickness. Secondly, the Film Thickness Monitor MTM-10 (optional) may also be used for manual termination.

The sputter current is set on a digital programmer and is not dependent on the argon gas pressure in the sputtering chamber. Pressure and current adjustment are carried out separately.

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